Inficon SQM-160 multi-film rate/thickness monitor¶
- class pymeasure.instruments.inficon.sqm160.SQM160(adapter, name='Inficon SQM-160 thickness monitor', baud_rate=19200, **kwargs)¶
Bases:
Instrument
Inficon SQM-160 multi-film rate/thickness monitor.
Uses a quartz crystal sensor to measure rate and thickness in a thin film deposition process. Connection to the device is commonly made through a serial connection (RS232) or optionally via USB or Ethernet.
- A command packet always consists of the following:
1 Byte: Sync character (‘!’ appears only at the start of a message).
- 1 Byte: length character obtained from the message length without CRC.
A value of 34 is added so that no ‘!’ can occur.
Command message with variable length.
2 Byte: Cyclic Redundancy Check (CRC) checksum.
- A response packet always consists of:
1 Byte: Sync character (‘!’ appears only at the start of a message).
- 1 Byte: length character obtained from the message length without CRC.
A value of 35 is added.
1 Byte: Response status character indicating the status of the command.
Response message with variable length.
2 Byte: Cyclic Redundancy Check (CRC) checksum.
- Parameters:
adapter – pyvisa resource name of the instrument or adapter instance
name (string) – Name of the instrument.
baud_rate (string) – Baud rate used by the serial connection.
kwargs – Any valid key-word argument for Instrument
- sensor_1¶
- Channel:
- sensor_2¶
- Channel:
- sensor_3¶
- Channel:
- sensor_4¶
- Channel:
- sensor_5¶
- Channel:
- sensor_6¶
- Channel:
- property all_values¶
Get the current rate (Angstrom/s), Thickness (Angstrom), and frequency (Hz) for each sensor
- property average_rate¶
Get the current average rate in Angstrom per second
- property average_thickness¶
Get the current average thickness in Angstrom
- check_set_errors()¶
Check the errors after setting a property.
- property firmware_version¶
Get the firmware version.
- property number_of_channels¶
Get the number of installed channels
- read()¶
Reads a response message from the instrument.
This method also checks for a correct checksum.
- Returns:
the response packet
- Return type:
string
- Raises:
ConnectionError – if a checksum error is detected or a wrong response status is detected.
- property reset_flag¶
Get the power-up reset flag. It is True only when read first after a power cycle.
- reset_system_parameters()¶
Reset all film and system parameters.
- reset_thickness_rate()¶
Reset the average thickness and rate.
This also sets all active Sensor Rates and Thicknesses to zero
- reset_time()¶
Reset the time of the monitor to zero.
- write(command)¶
Write a command to the device.
- class pymeasure.instruments.inficon.sqm160.SensorChannel(parent, id)¶
Bases:
Channel
Sensor channel for individual rate measurements.
- property crystal_life¶
Get the crystal life value in percent
- property frequency¶
Get the current frequency for a sensor in Hz
- property rate¶
Get the current rate for a sensor in Angstrom per second
- property thickness¶
Get the current thickness for a sensor in Angstrom